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Opis

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.

Szczegóły książki

Kategoria Książki po angielsku Mathematics & science Physics Materials / States of matter

• Pełny tytuł: High Density Plasma Sources
• Podtytuł: Design, Physics and Performance
• Autor: Popov, Oleg A. (Matsushita Electric Works, Woburn, MA, USA)
• Język: Angielski
• Oprawa: Twarda
• Liczba stron: 465
• EAN: 9780815513773
• ISBN: 0815513771
• ID: 04726906
• Wydawca: William Andrew
• Waga: 815 g
• Wymiary: 229 × 152 × 36 mm
• Data wydania: 31. December 1996

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