Microstructuring of Glasses

This is the first book that explains how to structure glass for micro- and nanophotonic applications. It deals with various glass compositions and their properties, and the interactions between glass and the electromagnetic waves used to modify it. The book also explores methods for influencing the geometrical microstructure of glass as well as methods to produce actual microdevices. It also details methods for influencing the geometrical microstructure of glasses.As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.