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Więcej informacji o Development of Mass Microsensors for Implantable MEMS

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Opis

Glaucoma is a disease that affects tens of millions of people around the world. The development of MEMS and the generation of new materials allow the development of implantable micro-devices with improved biocompatibility. The knowledge of biomolecules associated with the glaucoma pathology will increase the effectiveness of a microvalve for glaucoma tretmentt. In this sense, a mass microsensor capable of sensing biomolecules is desirable. This book was focused on the design, simulation, fabrication and characterization of MEMS-based mass microsensors for the detection of biomolecules. Regarding the biocompatibility, UNCD and Parylene were used as structural materials; as piezoelectric materials, quartz, PVDF and AlN were used. The parameters of the resonators were extracted by using 3D FEM models and experimental results. UNCD films used as substrate, yielded a highly oriented (002) AlN films even as thin as 80 nm; it exhibited a piezoelectric coefficient of about 5.3 pm/V, one of the highest demonstrated today. AlN/diamond structure is a very promising device for FBAR applications so it opens a huge field of biomedical applications.

Szczegóły książki

Kategoria Książki po angielsku Technology, engineering, agriculture Technology: general issues

• Pełny tytuł: Development of Mass Microsensors for Implantable MEMS
• Autor: Martín Zalazar
• Język: Angielski
• Oprawa: Miękka
• Liczba stron: 268
• EAN: 9783639708363
• ISBN: 3639708369
• ID: 07164926
• Wydawca: Scholars' Press
• Waga: 395 g
• Wymiary: 229 × 152 × 15 mm
• Data wydania: 21. February 2014

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