Code: 11571490
Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates ... more
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Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications.
503.32 zł
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