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Book synopsis

A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. §Additional chapters on optics, devices and laser systems complete this compact handbook. §A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

Book details

Book category Books in English Technology, engineering, agriculture Other technologies & applied sciences Applied optics

• Full title: Excimer Laser Technology
• Author: Dirk Basting, Gerd Marowsky
• Language: English
• Binding: Hardback
• Number of pages: 433
• EAN: 9783540200567
• ISBN: 3540200568
• ID: 01558579
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 1800 g
• Dimensions: 235 × 155 × 21 mm
• Date of publishing: 15. February 2004

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